Might mean (unverified): Small-scale, low-temperature ionized gas.
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We found 2 dictionaries that define the word microplasma:

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  1. microplasma: Wiktionary
  2. Microplasma: Wikipedia, the Free Encyclopedia

Definitions from Wiktionary (microplasma)

noun:  A gas discharge of small dimensions ranging from micrometers to millimeters, used in various medical and industrial applications.

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