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We found 2 dictionaries that define the word atomic layer etching:

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  1. Atomic layer etching, Atomic layer etching: Wikipedia, the Free Encyclopedia

Definitions from Wikipedia (Atomic layer etching)

noun:  an emerging technique in semiconductor manufacture, in which a sequence alternating between self-limiting chemical modification steps which affect only the top atomic layers of the wafer, and etching steps which remove only the chemically-modified areas, allows the removal of individual atomic layers.


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