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We found 2 dictionaries that define the word atomic layer epitaxy:

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  1. Atomic layer epitaxy, Atomic layer epitaxy: Wikipedia, the Free Encyclopedia

Definitions from Wikipedia (Atomic layer epitaxy)

noun:  Atomic layer epitaxy, more generally known as atomic layer deposition, is a specialized form of thin film growth (epitaxy) that typically deposit alternating monolayers of two elements onto a substrate.


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