Usually means: Optical technique measuring film thickness.
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We found 5 dictionaries that define the word ellipsometry:

General (3 matching dictionaries)
  1. ellipsometry: Wiktionary
  2. Ellipsometry: Wikipedia, the Free Encyclopedia
  3. ellipsometry: Stammtisch Beau Fleuve Acronyms

Computing (1 matching dictionary)
  1. ellipsometry: Encyclopedia

Science (1 matching dictionary)
  1. Ellipsometry: Eric Weisstein's World of Physics

Definitions from Wiktionary (ellipsometry)

noun:  An optical technique for investigating the dielectric properties of thin films, especially those used in fabricating semiconductors

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