Usually means: Controlled growth of crystal layers.
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We found 18 dictionaries that define the word epitaxy:

General (15 matching dictionaries)
  1. epitaxy: Merriam-Webster
  2. epitaxy: Oxford Learner's Dictionaries
  3. epitaxy: American Heritage Dictionary of the English Language
  4. epitaxy: Collins English Dictionary
  5. epitaxy: Vocabulary.com
  6. Epitaxy, epitaxy: Wordnik
  7. epitaxy: Wiktionary
  8. epitaxy: Webster's New World College Dictionary, 4th Ed.
  9. epitaxy: Infoplease Dictionary
  10. epitaxy: Dictionary.com
  11. Epitaxy: Wikipedia, the Free Encyclopedia
  12. epitaxy: Mnemonic Dictionary
  13. epitaxy: TheFreeDictionary.com
  14. epitaxy: FreeDictionary.org
  15. epitaxy: Rhymezone

Computing (1 matching dictionary)
  1. epitaxy: Encyclopedia

Medicine (2 matching dictionaries)
  1. DICTIONARY OF TERMS IN ORAL PHYSIOLOGY (No longer online)
  2. online medical dictionary (No longer online)

(Note: See epitaxial as well.)

Definitions from Wiktionary (epitaxy)

noun:  (crystallography) An overgrowth in which the overlying crystal is either induced into the same orientation, or otherwise grows under the influence of the underlying crystal into the same orientation.
noun:  A type of crystal growth or material deposition in which new crystalline layers are formed with one or more well-defined orientations with respect to the crystalline seed layer.

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