Might mean (unverified): Silicon-nitrogen cycle containing compound.
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We found one dictionary that defines the word cyclosilazane:

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  1. cyclosilazane: Wiktionary

Definitions from Wiktionary (cyclosilazane)

noun:  (inorganic chemistry) any compound consisting of a ring of alternating silicon and nitrogen atoms, especially -[SiH₂NH]ₙ- or its derivatives

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